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Deep reactive-ion etching
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41	Universität Karlsruhe (TH) Institut für Mikrostrukturtechnik (IMT) University of Washington Department of Electrical Engineering Master’s Thesis Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-01-25 03:55:40 Materials science Medicine Neuroimaging Single-unit recording Semiconductor device fabrication Nervous system Microelectromechanical systems Deep reactive-ion etching Cellular neuroscience Neurophysiology Microtechnology Biology
42	POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie, Lars Erdmann, Xu Zhu, Kaigham J. Gabriel† and Gary K. Fedder† Department of Electrical and Computer Engineering and † Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2005-06-13 11:06:39 Semiconductor device fabrication Nanotechnology Etching Microelectromechanical systems Transducers Surface micromachining Deep reactive-ion etching Comb drive Advanced Silicon Etch Microtechnology Materials science Technology
43	A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding Add to Reading List Source URL: deepblue.lib.umich.edu Language: English - Date: 2013-09-17 15:11:17 Technology Microelectromechanical systems Etching Wafer Microfabrication Deep reactive-ion etching Chemical-mechanical planarization Thermal oxidation Silicon on insulator Semiconductor device fabrication Materials science Microtechnology
44	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2005-06-13 10:40:36 Microelectromechanical systems Surface micromachining Etching Comb drive Microfabrication Deep reactive-ion etching Advanced Silicon Etch CMOS Micromachinery Microtechnology Materials science Technology
45	INTRODUCING SOLSTICE: ADVANCED PLATING FOR THE REST OF US! Designed for[removed]MM apps. Half the Big Guys’ price! Now: a cost-effective route to volume production Add to Reading List Source URL: electroiq.com Language: English - Date: 2014-12-11 12:51:26 Semiconductor device fabrication Electrical engineering Mechanical engineering Microelectromechanical systems Transducers Deep reactive-ion etching RF MEMS GlobalFoundries IMEC Technology Materials science Microtechnology
46	Enhancing Thermophotovoltaic Efficiencies with Photonics Add to Reading List Source URL: www.photovoltaic-conference.com Language: English - Date: 2014-10-14 07:51:14 Chemistry Electromagnetism Electricity Photovoltaics Thermodynamics Thermophotovoltaic Deep reactive-ion etching Titanium nitride Coating Semiconductor device fabrication Materials science Microtechnology
47	Capabilities Service Details Specific application Add to Reading List Source URL: www.ipms.fraunhofer.de Language: English - Date: 2015-01-15 19:37:11 Semiconductor device fabrication Nanotechnology Etching Microelectromechanical systems Transducers Surface micromachining Bulk micromachining Deep reactive-ion etching Chemical-mechanical planarization Materials science Microtechnology Technology
48	FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS IPMS CENTER NANOELECTRONIC TECHNOLOGIES (CNT) 1 2 Add to Reading List Source URL: www.ipms.fraunhofer.de Language: English - Date: 2015-01-15 03:29:57 Technology Chemistry Fraunhofer Society Chemical vapor deposition Deep reactive-ion etching Nanotechnology Etching Semiconductor device fabrication Materials science Microtechnology
49	3D INTEGRATION: TSV PROCESSES AND WAFER THINNING 1 Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 16:05:10 Technology Deep reactive-ion etching Microelectromechanical systems Etching Wafer Applied Materials Thermal oxidation Back end of line Photoresist Semiconductor device fabrication Materials science Microtechnology
50	Fraunhofer IMS F RAU N HOF E R I NST I T U T E F O R M IC RO E L EC T RO N I C C I RCU I T S A N D SYS T E MS I MS Add to Reading List Source URL: www.ims.fraunhofer.de Language: English - Date: 2014-02-15 05:05:49 Technology Microelectromechanical systems Etching Wafer Photoresist Stepper Deep reactive-ion etching Cleanroom Applied Materials Semiconductor device fabrication Materials science Microtechnology

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